The study of the surface quality of three types of corundum materials for microcircuit substrates has been carried out. It is shown that the surface quality after grinding and polishing depends on the size of the crystals in the ceramics, which is largely determined by the dispersion of the initial powder, additives, and the sintering regime. Il. 12, bibliography: 7 titles.
Dr. Tech. Sciences E. S. Lukin
1 (
This email address is being protected from spambots. You need JavaScript enabled to view it. ), E. V. Anufrieva
1 , N. A. Popova
1 , B. A. Morozov
2 , V. S. Preobrazhensky
2 , Cand. tech. Sciences V. A. Bezlepkin
2 , L. S. Ukhvatova
3 , G.V. Brzhezinsky
4 ;
1 D. I. Mendeleeva (Russia, Moscow),
2 JSC "Polikor" (Russia, Kineshma),
3 NIIIS (Russia, Nizhny Novgorod) ,
4 Regional Center "Nanoindustry" (Russia, Nizhny Novgorod)
Lukin E. S., Popova N. A., Zdvizhkova N. I. et al. Technology of ceramics based on aluminum oxide containing zirconium dioxide // Ogneupory. 1987. No. 5.S.8-10.
Dabizha A.A., Pliner S. Yu. Features of ceramics technology based on stabilized zirconium dioxide // Ogneupory. 1986. N 11. P. 23 - 29.
Fine technical ceramics / ed. H. Yanagida; per. with jap. Moscow: Metallurgy, 1986.278 p.
Lukin E. S., Popova N. A., Tsetskhelidze D. L. et al. Durable corundum ceramics "Sikor" // Refractories. 1991. No. 3.C.2-3.
Lukin E. S., Popova N. A., Zdvizhkova N. I. et al. Strong ceramics based on aluminum oxide and zirconium dioxide // Glass and ceramics. 1993.N9-10. S. 25-29. Lukin ES, Popova NA, Zdvizhkova NI A strong ceramic based on alumina oxide and zirconium dioxide // Glass and Ceram. 1993. V. 50.N9-10. P. 402-407. Kanygina
ON, Gerashchenko IP, Zinoviev OM Thermal stability, strength and structure of corundum ceramics // Glass and ceramics. 1993.N7-8.P.17-19. Kanygina ON, Gerashchenko IP, Zinov'ev ON Termal stability, strength, and structure of corundum ceramic // Glass and Ceram. 1993. V. 50.N7-8.P.345- 349.
Lukin ES Theoretical foundations of obtaining and technology of optically transparent ceramics: textbook. allowance. M .: MHTI im. D.I. Mendeleev, 1981.36 p.
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