Method of quartz rigging processing in micro- and nano-electronics production

Dr. Tech. Sciences TA ISMAILOV, Dr. T. E. SARKAROV, Ph.D. tech. Sciences A. R. SHAKHMAEVA, Cand. tech. B. A. SHANGEREEVA ( e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it. ); FGBOU VO & # 171; Dagestan State Technical University & # 187; (Russia, Dagestan, Makhachkala)

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