The results of processing measurements of the TLEC and relative elongation of borosilicate glasses of two grades are presented. LK5 and Borofloat 33. The thermomechanical analyzer TMA7100 was used to measure the elongation of glass samples in the temperature range from 130 to 800 K (from ?143 to +526 ° C). The relative error of indirect measurements of TCLE and relative thermal elongation of glasses of both grades does not exceed ?5 and ?3%, respectively. Polynomial equations are presented that approximate the obtained measurement results as a function of temperature. The results obtained will facilitate the tasks of modeling the characteristics of microsystem technology devices manufactured using the anodic fit of silicon on glass, and they can also be used to optimize the temperature regime of silicon-glass bonding.
1. Novikova SI Thermal expansion of solid bodies. Moscow: Nauka, 1974.294 p.
2. Certificate of type approval of measuring instruments? 50103-12 dated 01.06.2012: Thermomechanical analyzers of the EXSTAR TMA / SS 7000 series, models TMA / SS 7100 and TMA / SS 7300. M .: Federal Agency for Technical Regulation and Metrology, 2012.
3. Kravchenko NS, Revinskaya O D. Methods of processing the results of measurements and estimation of errors in the educational laboratory workshop: textbook. allowance. Tomsk: Publishing house Tomsk. polytechnic University, 2011.86 p.
4. Watanabe H., Yamada N., Okaji M. Linear thermal expansion coefficient of silicon from 293 to 1000 K // International Journal of Thermophysics. 2004. V. 25. N 1. P. 221? 236.
5. LK5 glass type / Lytkarino Optical Glass Factory, JSC [Lytkarino optical glass plant]: company website. URL: http://lzos.ru/glass_pdf/LK5.pdf (date of treatment 03/01/2015).
6. Schott Borofloat 33. The versatile floated borosilicate glass? with an infinite number of applications / SCHOTT Technical Glass Solutions GmbH: company website. URL: http://www.schott.com/borofloat/russian/download/borofloat_33_e.pdf (access date 01.11.2014).
7. Kablov EN, Grashchenkov DV, Isaeva NV, et al. High-temperature structural composite materials based on glass and ceramics for promising products of aviation technology. Glass and Ceramics. 2012.? 4.S. 7? 11.
Kablov EN, Grashchenkov DV, Isaeva NV et al. Glass and ceramics based high-temperature composite materials for use in aviation technology // Glass and Ceram. 2012. V. 69. N 3? 4.P. 109? 112.
The article can be purchased
electronic!
PDF format
700 руб
UDK 666.1:621.3.082.61:536.413.2
Article type:
At the enterprises and institutes
Make a request
