Steklo i Keramika (Glass and Ceramics). Monthly scientific, technical and industrial journal

 

ISSN 0131-9582 (Online)

Autors: Pautkin V. E.
  • Continuous numbering: 1096
  • Pages: 28-31
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Heading: At the enterprises and institutes

The use of alkaline glass in the construction of micromechanical sensors, in particular, accelerometers, is presented. Alkaline glass is used in the design of the sensitive elements of these devices. The main process step for assembling such sensing elements is the electrostatic connection, also known as the anode connection. At the same time, a number of complex physical effects occur in the glass. The reliability of the functioning of the manufactured devices depends on the quality of performance of parts made of alkaline glass and silicon.
GOST R 8.596? 2002. State system for ensuring the uniformity of measurements. Metrological support of measuring systems. Basic provisions. M .: Standartinform, 2002.15 p. Mokrov E. A., Papko A. A. Accelerometers of the Research Institute of Physical Measurements? elements of microsystem technology // Microsystem technology. 2002.? 1. P. 3. Kozin SA, Fedulov AV, Pautkin VE Development of technology and special equipment for joining silicon with glass in a high voltage field // Sensors and Systems. 2005.? 9, p. 46? 47. Glinka NL General chemistry: textbook. manual for universities / ed. V. A. Popkova, A. V. Babkova. 19th ed., Rev. and add. M .: Yurayt, 2015.900 p. Yavorskiy BM, Detlaf AA Physics Handbook for Engineers and University Students. 8th ed. M .: Onyx, 2006.1056 p. Tabenkin A. N., Tarasov S. B., Stepanov S. N. Roughness, waviness, profile. International experience / ed. Cand. tech. Sciences N.A. Tabachnikova. SPb .: Publishing house of Polytechnic. University, 2007.136 p. Prokopyev EP, Timoshenkov SP, Suvorov AL et al. Features of the technology of SOI structures fabrication by direct splicing of silicon wafers and their quality control. M .: Institute of Theoretical and Experimental Physics, 2000. 19 p., [1].

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Pautkin V. E. Application of Alkaline Glass in Constructions of Micromechani-cal Sensors. Steklo i keramika. 2019:92(4):28-31. (in Russ). UDK 666.112:531.7.084.2