The paper presents the results of work on stabilizing the wall thickness of quartz tubes by external vapor-phase deposition during high-temperature hydrolysis of silicon tetrachloride. The technological parameters of the deposition of the porous layer and its sintering have been determined. Defect-free glass layers with a thickness of more than 0.2 mm were obtained with the possibility of reducing the circumferential thickness difference of pipes from 0.2 to 0.05 mm.
S. V. Bureev
1 , Dr. Tech. Sciences M. A. Yeronian
1 , A. Yu. Kulesh
2 (
This email address is being protected from spambots. You need JavaScript enabled to view it. ), Dr. Sciences I.K. Meshkovsky
2 , E.I. Romashova
1 , Cand. chem. Sciences M. K. Tsibinogin
3 ;
1 JSC "Scientific Research and Technological Institute of Optical Materials Science VSC" GOI named after S. I. Vavilov "(Russia, St. Petersburg),
2 St. Petersburg National Research University of Information Technologies, Mechanics and Optics (Russia, St. Petersburg),
3 < / sup> JSC "Perm Scientific and Production Instrument-Making Company" (Russia, Perm)
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