Steklo i Keramika (Glass and Ceramics). Monthly scientific, technical and industrial journal

 

ISSN 0131-9582 (Online)

Autors: Pautkin V. E.
  • Continuous numbering: 1113
  • Pages: 3-6
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The physicochemical processes occurring in the structure of alkaline glass and at the silicon - glass interface during the anodic connection of glass and silicon plates are considered. The connection of these materials is currently widely used in industry to create sensitive elements of micromechanical sensors, such as pressure, acceleration , etc. features of the parts to be joined (for example, the thickness of glass plates)
Pautkin V.E., Application of alkaline glass in the design of micromechanical sensors, Glass and Ceramics. 2019.? 4.S. 28? 31. ? Pautkin VE Use of Alkaline Glass in Micromechanical Sensor Structures // Glass Ceram. 2019. V. 76. No. 3? 4. P. 142? 144.? Pautkin, V.E., Physicochemical foundations of anodic compound of MEMS elements, Izmerenie. Monitoring. Control. Control. 2019.? 2 (28). S. 94? 98. DOI: 10.21685 / 2307-5538-2019-2-11. Artamonova M. V., Aslanova M. S., Buzhinsky I. M. et al. Chemical technology of glass and sitall / ed. N.M. Pavlushkina. Moscow: Stroyizdat, 1983.432 p. Eitel V. Physical chemistry of silicates / per. from English ed. N.N. Kurtseva et al. M .: Publishing house of foreign literature, 1962.1055 p. (Eitel W. The Physical Chemistry of the Silicates. The University of Chicago Press, 1954). Kozin S.A., Fedulov A.V., Pautkin V.E. Development of technology and special equipment for joining silicon with glass in a high-voltage field. 2005.? 9, p. 46? 47. Broday I., Merey J. Physical foundations of micro-technology / per. from English under. ed. A. V. Shalnova. Moscow: Mir, 1985.442 p. (Brodie I. and Muray JJ The Physics of Microfabrication. SRI International. Plenum Press, 1982). Mazurin O. V., Totesh A. S., Streltsina M. V., Shvaiko-Shvaikovskaya T. P. Thermal expansion of glass. L .: Nauka, 1969.216 p. Zi S. Physics of semiconductor devices: in 2 kn. Book. 1: trans. from English Ed. 2nd, rev. and add. Moscow: Mir, 1984.456 p. (Sze SM Physics of Semiconductor Devices. A Wiley-Interscience Publication, 1981).

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Pautkin V. E. Physico-Chemical Processes in Alkaline Glass at Anodic Bonding of Glass and Silicon. Steklo i keramika. 2020:93(9):3-6. (in Russ). UDK 666.11.01:53.096