Two-stage method of hollow channels formation inside glass by direct laser writing and selective etching is perspective way for microfluidics devices manufacturing. In this work the influence of the etching solution concentration and laser writing conditions (the laser beam scanning speed, pulse energy) on the etching rate, selectivity and roughness of hollow channels in quartz glass is studied. The use of 1M NaOH makes it possible to increase the etching rate of hollow channels up to 300 µm/h while maintaining high selectivity up to 680.
Tatiana O. Lipateva – PhD in chemistry, assistant of the Department of Chemical Technology of Glass and GLASS-CERAMICS of THE MENDELEEV UNIVERSITY of Chemical Technology of Russia (Mendeleev University), Moscow, Russia. E-mail: This email address is being protected from spambots. You need JavaScript enabled to view it..
Semyon I. Stopkin – student of the Department of Chemical Technology of Glass and Glass-Ceramics of the Mendeleev University of Chemical Technology of Russia (Mendeleev University), Moscow, Russia. E-mail: This email address is being protected from spambots. You need JavaScript enabled to view it..
Alexey S. Lipatiev – PhD in Chemistry, Assistant of the Department of Chemical Technology of Glass and Glass-Ceramics of the Mendeleev University of Chemical Technology of Russia (Mendeleev University), Moscow, Russia E-mail: This email address is being protected from spambots. You need JavaScript enabled to view it..
Sergey V. Lotarev – PhD in Chemistry, Associate Professor of the Department of Chemical Technology of Glass and Glass-Ceramics of the Mendeleev University of Chemical Technology of Russia (Mendeleev University), Moscow, Russia. E-mail: This email address is being protected from spambots. You need JavaScript enabled to view it..
Sergey S. Fedotov – PhD in Chemistry, Assistant of the Department of Chemical Technology of Glass and Glass-Ceramics of the Mendeleev University of Chemical Technology of Russia (Mendeleev University), Moscow, Russia. E-mail: This email address is being protected from spambots. You need JavaScript enabled to view it..
Vladimir N. Sigaev – DSc. in Chemistry, Professor, Head of the International Center of Laser Technologies, Head of the P.D. Sarkisov International Laboratory of Functional Glass-based Materials, Head of the Department of Chemical Technology of Glass and Glass-Ceramics of the Mendeleev University of Chemical Technology of Russia (Mendeleev University), Moscow, Russia. E-mail: This email address is being protected from spambots. You need JavaScript enabled to view it..
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DOI: 10.14489/glc.2022.07.pp.003-008
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