The approaches to laser processing of ultra-thin K-208 glass, which is promising for the fabrication of glass interposers in 2.5D/3D microelectronics, are considered. The requirements for through-glass vias (TGV) and cut quality, including geometry, aspect ratio, and uniformity of metallization, are discussed. The feasibility of two laser methods was studied: drilling using sub-nanosecond bursts of femtosecond pulses and cutting by controlled thermal cleavage using a CO2 laser. In the experiments, the energy and number of pulse bursts, the beam waist position, as well as the CO2 laser parameters and the number of passes, were varied. The morphology of the holes and cuts was analyzed by optical microscopy. Stressed regions and the bending strength of the samples were studied. The fundamental possibility of forming through holes in ultra-thin glass ribbon and obtaining a defect-free laser cut was demonstrated. Factors limiting reproducibility and strength were noted, and the role of subsequent heat treatment was assessed. The obtained data can be used in the development of technological processes for manufacturing glass interposers.
Sergey S. Fedotov – PhD in Chemistry, Associate Professor, Department of Chemical Technology of Glass and Glass-Ceramics, Mendeleev University of Chemical Technology of Russia (MUCTR), Moscow, Russia
Filaret S. Balakhhonov – student, Department of Chemical Technology of Glass and Glass-Ceramics, Mendeleev University of Chemical Technology of Russia (MUCTR), Moscow, Russia
Yuliana V. Spitsyna – postgraduate student, Department of Chemical Technology of Glass and Glass-Ceramics, Mendeleev University of Chemical Technology of Russia (MUCTR), Moscow, Russia
Tatiana O. Lipateva – PhD in Chemistry, Associate Professor, Department of Chemical Technology of Glass and Glass-Ceramics, Mendeleev University of Chemical Technology of Russia (MUCTR), Moscow, Russia
Alexey S. Lipatiev – PhD in Chemistry, Associate Professor, Department of Chemical Technology of Glass and Glass-Ceramics, Mendeleev University of Chemical Technology of Russia (MUCTR), Moscow, Russia
Vladimir N. Sigaev – DSc. in Chemistry, Professor, head of the International Center of Laser Technologies, head of the P. D. Sarkisov International Laboratory of Functional Glass-based Materials, head of the Department of Chemical Technology of Glass and Glass-Ceramics, Mendeleev University of Chemical Technology of Russia (MUCTR), Moscow, Russia
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DOI: 10.14489/glc.2026.11.pp.009-013
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