Steklo i Keramika (Glass and Ceramics). Monthly scientific, technical and industrial journal

 

ISSN 0131-9582 (Online)

  • Continuous numbering: 1073
  • Pages: 25-28
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Heading: Coatings

Various methods of protecting the surface of silicon substrates for the manufacture of silicon transistors have been proposed. The results of thermal operations with technological modes of obtaining a low-melting glassy layer in order to protect the surface of pn-junctions substrates from various external influences are presented.
Kurnosov A.I. Materials for semiconductor devices and integrated circuits. M .: Higher. shk., 1980.327 p. Pichugin I. G., Tairov Yu. M. Technology of semiconductor devices. M .: Higher. shk., 1984.287 p. Kurnosov A.I., Yudin V.V. Manufacturing technology of semiconductor devices and integrated circuits. M .: Higher. shk., 1986.367 p. Pat. 2008129513/28 RF. IPC H01L 21/3105. Ismailov TA, Shangereeva BA, Shakhmaeva AR Method of surface protection for pn-transition crystals based on fusible glass; ? 2370852; declared 07/17/08; publ. 20.10.09 // Bul. 2009.? 29.3 p. Pat. 2013100522/28 RF. IPC H01L 21/316. Ismailov TA, Shangereeva BA, Shangereev Yu. P., Murtazaliev AI Method of surface protection for pn-junctions crystals based on vanadium oxide; ? 2534438; declared 07/20/14; publ. 11/27/14 // Bul. 2014.? 33.4 s.

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Ismailov T. A., Sarkarov T. E., Shangereeva B. A., Shakhmaeva A. R. Low-melting glass based protective coating for silicon substrates in silicon transistors production. Steklo i keramika. 2017:90(5):25-28. (in Russ). UDK 666.112.7:621.315.615